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Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer a pattern onto a substrate, typically a silicon wafer. The process begins with a photosensitive material, called a photoresist, being applied to the substrate.
Learn about optical lithography, a photon-based technique for projecting images onto photosensitive substrates, from various chapters and articles. Find out how optical lithography is used in nano-electronics, paper-based sensors, and other applications.
Optical lithography is also called photolithography or sometimes just lithography. Lithography refers to the process invented in 1796 by Alloys Senefelder , where patterns of desired designs were transferred on to a base substrate, mostly using photomasks (or reticle).
16 de nov. de 2007 · This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.
With his stimulating modern textbook, Optical and EUV Lithography: A Modeling Perspective, Andreas Erdmann provides a handbook that aids anyone interacting with photolithography modeling and simulation in the understanding of complex modeling paradigms.
Photolithography is a process of transferring a geometric pattern from a photomask to a light-sensitive photoresist using light. Learn about the history, resolution, registration, and throughput of photolithography, as well as alternative lithography techniques.
Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization.
